专利名称：Replaceable fluid dispensing nozzle发明人：Everett J. Branderhorst,Jose Y. Gonzales申请号：US07/811167申请日：19911219公开号：US05196064A公开日：19930323
摘要：A nozzle assembly for use in a semiconductor fabrication liquid dispensingapparatus which dispenses a liquid onto a surface. The nozzle assembly comprises abulkhead comprised of a non-stick material (such as Teflon® or similar material) coupledat a first end to a dispensing tube. The nozzle is removable and reusable so that aninventory of replaceable nozzles may be kept on hand for optimum operation of a liquiddispensing apparatus.
申请人：INTEL CORPORATION
代理机构：Blakely, Sokoloff, Taylor & Zafman
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